A FEASIBILITY STUDY OF ZnO - BASED FBAR DEVICES FOR AN ULTRA - MASS - SENSITIVE SENSOR APPLICATION
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چکیده
We present a feasibility study of ZnO-based FBAR devices and their fabrications for the ultra-mass-sensitive sensor application. In this work, a considerable shift in the resonance frequency is observed due to the mass-loading effect by a mixture of ink and volatile methanol. A high sensitivity of 0.05 10 Hz cm/ng is obtained in the FBAR-based device, which is 5 orders of magnitude higher than that of 0.057 Hz cm/ng reported in the conventional 5-MHz quartz crystal microbalance. This approach seems useful for the ultra-highmass resolution chemical sensor or biosensor applications. © 2004 Wiley Periodicals, Inc. Microwave Opt Technol Lett 42: 505–507, 2004; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.20351
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تاریخ انتشار 2004